纳米医学与纳米技术杂志

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Nanolithography: Techniques are used in Nanolithography

Dr. Katelin Forns

Nanolithography is the process of creating nanoscale patterns or structures on a substrate using various techniques such as electron beam lithography, scanning probe microscopy, and nanoimprint lithography. It has become an important tool in nanotechnology research and development due to its ability to fabricate complex structures with precise control over feature size, shape, and placement. Electron beam lithography (EBL) is one of the most commonly used techniques in nanolithography. It involves the use of a focused beam of electrons to create patterns on a substrate coated with a resist material. The resist material is selectively exposed to the electron beam, which causes a chemical change that allows for the creation of high-resolution patterns with feature sizes as small as a few nanometers. Scanning probe microscopy (SPM) is another popular technique in nanolithography. It involves the use of a sharp tip, such as an atomic force microscope (AFM) or a scanning tunneling microscope (STM), to directly pattern a substrate surface by scanning the tip across the surface. SPM has the advantage of being able to pattern surfaces that are not flat or uniform, and can create patterns with resolutions down to a few atoms.

Nanoimprint lithography (NIL) is a relatively new technique that involves the use of a mold to transfer a pattern onto a substrate. The mold is typically made using EBL or SPM and is used to press a resist material onto the substrate to create the desired pattern. NIL has the advantage of being able to produce large-scale patterns with high resolution and has potential for mass production. Nanolithography has numerous applications in various fields such as microelectronics, photonics, and biotechnology. In microelectronics, nanolithography is used to fabricate nanoscale features on semiconductor substrates for the production of microchips and other electronic devices. In photonics, nanolithography is used to create photonic structures such as waveguides and gratings for optical communication and sensing applications. In biotechnology, nanolithography is used to create patterns and structures for cell manipulation and tissue engineering.